HYBRID INSPECTION SYSTEM AND METHOD EMPLOYING BOTH AIR-COUPLED AND LIQUID-COUPLED TRANSDUCERS

摘要

A hybrid inspection system and method are provided which utilize both an air-coupled transducer and a liquid-coupled transducer in order to enjoy the advantages offered by both types of transducers. The hybrid inspection system may include a first probe that includes the air-coupled transducer, such as a capacitive machined ultrasonic transducer, which is configured to emit ultrasonic signals and to air couple the ultrasonic signals into a workpiece. The hybrid inspection system may also include a second probe that includes the liquid-coupled transducer, such as a piezoelectric transducer, configured to receive the ultrasonic signals emitted by the air-coupled transducer of the first probe via a liquid coupling between the transducer and the workpiece.