VACUUM EVACUATION SYSTEM, METHOD FOR OPERATING VACUUM EVACUATION SYSTEM, REFRIGERATING MACHINE, VACUUM EVACUATION PUMP, METHOD FOR OPERATING REFRIGERATING MACHINE, METHOD FOR CONTROLLING OPERATION OF TWO-STAGE REFRIGERATING MACHINE, METHOD FOR CONTROLLING OPERATION OF CRYOPUMP, TWO-STAGE REFRIGERATING MACHINE, CRYOPUMP, SUBSTRATE PROCESSING APPARATUS, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE

摘要

Multiple vacuum evacuation pumps each comprising a refrigerating machine are connected to a common compressor.  At least one of the multiple vacuum evacuation pumps is operated so as to repeat an operation including a step in which the interior of a cylinder is shifted from a low-pressure state to a high-pressure state by the operation of a valve of the refrigerating machine and thereby gas in the low-pressure state is adiabatically compressed, and a step in which a displacer passes through the adiabatically compressed gas.  At least another one of the multiple vacuum evacuation pumps is operated so as to repeat an operation including a step in which the interior of a cylinder is shifted from a high-pressure state to a low-pressure state by the operation of a valve of the refrigerating machine and thereby gas in the high-pressure state is adiabatically expanded, and a step in which a displacer passes through the adiabatically expanded gas.