Pressure-sensitive adhesive sheet for UV laser processing and UV laser processing method

摘要

In performing the laser processing of a workpiece (1) with laser light (6), there are provided a pressure-sensitive adhesive sheet (2) for laser processing and a laser processing method that can perform the laser processing of a workpiece (1) easily with good production efficiency by preventing the fusion of a substrate (2b) and an adsorption stage. According to the invention, an pressure-sensitive adhesive sheet (2) for laser processing that is used for laser processing of a workpiece (1) with laser light (6) having a wavelength in an ultraviolet region or with laser light (6) that enables light absorption in an ultraviolet region that has passed a multiphoton absorption process, comprising a substrate (2b) and an pressure-sensitive adhesive layer (2a) disposed on one surface of the substrate (2b), wherein a melting point of the substrate at another surface is 80°C or higher, and an etching rate (etching speed / energy fluence) in a case of radiating the laser light (6) onto the other surface is 0.1 [(µm /pulse) / (J/cm2)] or lower.