首页> 外国专利> SCATTERED LIGHT COLLECTOR, LIGHT FOCUSING APPARATUS, METHOD FOR CONTROLLING THE FOCUS OF A FOCUSED LIGHT SOURCE AND METHOD FOR MEASURING THE LIGHT SCATTERED OR ORIGINATING FROM A POINT OF AN OBJECT

SCATTERED LIGHT COLLECTOR, LIGHT FOCUSING APPARATUS, METHOD FOR CONTROLLING THE FOCUS OF A FOCUSED LIGHT SOURCE AND METHOD FOR MEASURING THE LIGHT SCATTERED OR ORIGINATING FROM A POINT OF AN OBJECT

机译:散射光收集器,光聚焦装置,控制聚焦光源的聚焦的方法以及从物体的点测量散射或起源的光的方法

摘要

A scattered light collector for collecting light scattered by or originating from an object (210) to be examined and for guiding the collected light to a light detector (204), the collector comprising: a first free propagation region (223) for receiving scattered light comprising a light collection end and an input grating line, and a plurality of waveguides (236a, b, c) for guiding the collected light from the free propagation region to the detector, the first ends of the waveguides forming the input grating line of the free propagation region.
机译:散射光收集器,用于收集由要检查的对象(210)散射或从其发出的光,并将收集的光引导至光检测器(204),该收集器包括:第一自由传播区域(223),用于接收散射光包括光收集端和输入光栅线,以及用于将收集的光从自由传播区域引导到检测器的多个波导(236a,b,c),波导的第一端形成光的输入光栅线。自由传播区。

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