FIC INSTALLATION AND METHOD FOR OPERATING A FIC INSTALLATION IN THE PRESSURE RANGE ABOVE ATMOSPHERIC PRESSURE

摘要

A method of Fluoride Ion Cleaning (FIC) of a component is provided. A FIC installation includes a reaction chamber and a reactive gas or a reactive gas mixture. A pressure of the reactive gas or the reactive gas mixture in the reaction chamber is set at least occasionally above atmospheric pressure, wherein the pressure in the reaction chamber is periodically lowered and raised.