POSITIONING APPARATUS CAPABLE OF SUPPRESSING A MEASUREMENT ERROR DUE TO ACCELERATION/DECELERATION OF A STAGE

摘要

PURPOSE: A positioning apparatus is provided to suppress a measurement error generated by acceleration/deceleration of a stage.;CONSTITUTION: A positioning apparatus for determining a stage includes a measuring system, a corrector, and a commutator. The measuring system(3,4) measures a position of a stage(7). The corrector(15) corrects a value measured by the measuring system based on acceleration of a progressive direction of the stage. The measuring system includes a measuring instrument. The measuring instrument measures a position of the stage in a second direction. The commutator(16) measures a position of the stage when the stage is moved into a first direction.;COPYRIGHT KIPO 2010