SLITTED ROLL OF A FILM TYPE TRANSFER MATERIAL FOR SECURING RELIABILITY OF EXPOSURE PROCESS IN A PHOTOLITHOGRAPHY PROCESS AFTER LONG-TERM STORAGE

摘要

PURPOSE: A slitted roll of a film type transfer material is provided to secure the stability of products after a long-term storage and to maintain exposure efficiency.;CONSTITUTION: A slitted roll of a film type transfer material is such that a type transfer material consisting of a base film, a photoresist layer, and a protection film is wound on a roll. A sensitivity rate defined by the formula: (proper exposure energy after exposure to severe environment - initial optimal exposure energy) / initial optimal exposure energy * 100 is 5 % or less.;COPYRIGHT KIPO 2010