METHOD FOR CONTROLLING THE SPEED OF A TRANSFER UNIT, A METHOD FOR TRANSFERRING A SUBSTRATE USING THE SAME AND A SUBSTRATE PROCESSING APPARATUS, CAPABLE OF IMPROVING THE TRANSFER EFFICIENCY OF THE SUBSTRATE

摘要

PURPOSE: A method for controlling the speed of a transfer unit, a method for transferring a substrate using the same and a substrate processing apparatus are provided to improve the transfer efficiency of the substrate by applying different impacts on the substrate loaded on a transfer arm for each transfer section and offsetting the vibration of the substrate.;CONSTITUTION: A loading/unloading unit(110) includes a plurality of load ports(110a, 110b, 110c, 110d). A FOUP(front open unified pods)(120a, 120b, 120c, 120d) for storing a wafer is placed on the load ports. An index robot(200) is installed between the loading/unloading unit and a buffer unit(300). The index robot transfers the wafer along a first transfer rail(20). An arm driving unit horizontally transfers an index arm(220). Control units(710, 720) control the transfer speed of the index arm.;COPYRIGHT KIPO 2010