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PIEZOELECTRIC MICROSPEAKER CAPABLE OF OFFSETTING AN INITIAL STRESS DUE TO A RESIDUAL STRESS BY SYMMETRICALLY FORMING A LOWER DRIVING UNIT AND AN UPPER DRIVING UNIT, AND A MANUFACTURING METHOD THEREOF
PIEZOELECTRIC MICROSPEAKER CAPABLE OF OFFSETTING AN INITIAL STRESS DUE TO A RESIDUAL STRESS BY SYMMETRICALLY FORMING A LOWER DRIVING UNIT AND AN UPPER DRIVING UNIT, AND A MANUFACTURING METHOD THEREOF
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机译:能够通过对称地形成下部驱动单元和上部驱动单元而使残余应力抵消初始应力的压电显微镜及其制造方法
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摘要
PURPOSE: A piezoelectric microspeaker and a manufacturing method thereof are provided to control the distortion of a signal in the alternating current applying state by symmetrically placing an upper driving unit and a lower driving unit.;CONSTITUTION: A lower driving unit(102) and a upper driving unit(103) are symmetrically formed around a vibration plate(101). The lower driving unit comprises a first driving electrode(201), a first piezo-plate(202) and a first common electrode(203) connected to a common power supply. The upper driving unit comprises a second driving electrode(301), a second piezo-plate(302) which has a form transformed according to a voltage and a second common electrode(303) connected to the common power supply. The first and the second driver electrodes are connected to a driving power. The first and the second common electrodes are connected to a common power supply.;COPYRIGHT KIPO 2010
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