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APPARATUS FOR RECOVERING SULFUR HEXAFLUORIDE, CAPABLE OF RECOVERING THE SULFUR HEXAFLUORIDE OF HIGH PURITY USING MEMBRANE SEPARATION AND PHASE CHANGE PROPERTY
APPARATUS FOR RECOVERING SULFUR HEXAFLUORIDE, CAPABLE OF RECOVERING THE SULFUR HEXAFLUORIDE OF HIGH PURITY USING MEMBRANE SEPARATION AND PHASE CHANGE PROPERTY
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机译:用于回收六氟化硫的设备,能够通过膜分离和相变特性来回收高纯度的六氟化硫
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摘要
PURPOSE: An apparatus for recovering sulfur hexafluoride is provided to miniaturize the device for recovering the sulfur hexafluoride(SF_6) from mixed gas through simple membrane separation and to obtain the sulfur hexafluoride of high purity.;CONSTITUTION: An apparatus for recovering sulfur hexafluoride comprises; a pulverized body removal part(20) which removes the pulverized body by passing mixed gas of the sulfur hexafluoride through a filer layer; an acidic gas removal part(30) which introduces the mixed gas of the sulfur hexafluoride into a packed layer of calcium carbonate(CaCO_3), NaF_2, calcium hydroxide(Ca(OH)_2), and calcium chloride(CaCl_2); a moisture removal part(40) passing the mixed gas through zeolite or an activated carbon layer; a membrane separation part(50) separating the mixed gas into nitrogen(N_2), oxygen(O_2), and concentrated sulfur hexafluoride by passing the mixed gas through a membrane separator; a gas-liquid separating tank(60) separating gas and liquid using the difference of condensing temperatures by compressing the sulfur hexafluoride gas into liquid; and a sulfur hexafluoride reservoir(70). It includes.;COPYRIGHT KIPO 2010
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