METHOD FOR MANUFACTURING POLYURETHANE FOAM, CAPABLE OF HAVING MICRO PORES WHICH ARE UNIFORMLY DISTRIBUTED WITHOUT INSERTING A SEPARATE HOLLOW SPHERE, AND A POROUS POLISHING PAD WHICH IS PREPARED USING THE SAME

摘要

PURPOSE: A method for manufacturing polyurethane foam is provided to have no scratch on the surface of a wafer, to improve a polishing speed and abrasion efficiency, and to more efficiently manufacture the polyurethane foam having micro pores which are uniformly distributed.;CONSTITUTION: A method for manufacturing polyurethane foam comprises the following steps: manufacturing a liquid mixture including a resin monomer and one or more which are selected from polyol and isocyanate-terminated urethane prepolymers; performing a polymerization reaction while injecting non-reactive gas into the mixture at a high pressure more than 20 atm; performing the polymerization reaction while foaming a product in a decompression condition of 15 atm or less; and solidifying a resin polymer which is produced by increasing the temperature of the product.;COPYRIGHT KIPO 2010