JIG FOR IRRADIATING IONS AND A METHOD FOR MANUFACTURING A TEM SPECIMEN USING THE SAME, CAPABLE OF SIMULTANEOUSLY OBSERVING A REGION IRRADIATED WITH IONS AND A REGION ON WHICH IONS ARE NOT IRRADIATED

摘要

PURPOSE: A jig for irradiating ions and a method for manufacturing a TEM specimen using the same are provided to irradiate ions at low and high temperature by physically fixing the specimen.;CONSTITUTION: A cover unit(100) comprises an ion inlet(110), a base fixing unit and a base coupling unit(130). A base unit(200) is combined to correspond to the cover unit. The base unit includes a specimen holder(211), a first step(210), a second step(220), and a third step(230). A specimen(400) for irradiating ions is settled on the specimen holder. A washer(510,520) is positioned on the upper and lower sides to closely adhere the specimens.;COPYRIGHT KIPO 2011