MICROORGANISM DETECTION SENSOR IN WHICH MICROORGANISM-INDUCING MICROFLUIDIC CHANNEL IS CONJUGATED ON CARBON NANOTUBE TRANSISTOR ARRAY

摘要

PURPOSE: A microorganism detection sensor is provided to induce arrangement of target microorganism to the surface of carbon nanotube and to improve sensitivity.;CONSTITUTION: A microorganism detection sensor comprises: a gate formed on a silicon substrate(1); a metal source electrode(3) at one side of the gate; a metal drain electrode(3') at the opposite side of the gate; a carbon nanotube transistor array(10); a recognizing material which specifically binds to microorganism on the surface of the carbon nanotube; and microfluidic channel(5). A method for manufacturing microorganism detection sensor comprises: a step of forming a carbon nanotube transistor array comprising the metal source electrode, metal drain electrode, and gate; a step of fixing the fixing material on the surface of the carbon nanotube; a step of attaching the recognizing material which specifically binds to the microorganism; and a step of conjugating the microfluidic channel to the carbon nanotube transistor array.;COPYRIGHT KIPO 2011