THIN FILM FOR DETECTING GAS, A GAS SENSOR INCLUDING THE SAME, AND A METHOD FOR MANUFACTURING A GAS SENSOR AND A THIN FILM FOR DETECTING GAS, CAPABLE OF IMPROVING THE REACTIVITY OF THE THIN FILM WITH GAS

摘要

PURPOSE: A thin film for detecting gas, a gas sensor including the same, and a method for manufacturing a gas sensor and a thin film for detecting gas are provided to manufacture a porous crystalline tin oxide thin film having improved reaction with certain gas, since a thin tin film is anodized and heat-treated.;CONSTITUTION: A method for forming a thin film for detecting gas comprises following steps. A thin tin film is formed on a substrate. A thin tin film is anodized, so that a porous amorphous tin oxide film may be formed. The porous amorphous tin oxide film is heat-treated, so that the porous crystalline tin oxide thin film may be formed.;COPYRIGHT KIPO 2011