GRIPPER FOR CARRYING RETICLE, CAPABLE OF QUICKLY DRAWING OUT OR RECEIVING THE RETICLE AT A LIBRARY

摘要

PURPOSE: A gripper for carrying reticle is provided to prevent the reticle from being separated from a gripper by visually displaying the griping state.;CONSTITUTION: A gripper(100) includes a bar type handle(20). A signal unit(40) is positioned on the upper side of the handle. An LED lamp(41) is installed on the signal unit to be protruded. The signal unit includes a charging port(42) connected to external power to charge a battery(B). A sensor which senses the received state of the reticle is connected to the signal unit with wires.;COPYRIGHT KIPO 2011