METHOD FOR FABRICATING NANOPATTERN EMBEDDING NANOPARTICLES, AND ELECTRONIC DEVICE

摘要

PURPOSE: A method for preparing nanopattern having nanoparticles is provided to improve degree of integration by arranging nanoparticles of various materials in a nanoscale pattern. CONSTITUTION: A method for preparing a nanopattern having nanoparticles comprises: a step of forming a sacrificed pattern layer(32,34) having a groove which exposes a part of upper substrate(30); a step of applying block copolymer micelle solution containing nanoparticles on the substrate having a sacrificed pattern; and a step of removing the block copolymer micelle(40).