MANUFACTURING METHOD OF A HYDROGEN GAS SENSOR USING METAL OXIDE NANO PARTICLE AND CATALYST, CAPABLE OF IMPROVING HYDROGEN DETECTION PERFORMANCE

摘要

PURPOSE: A manufacturing method of a hydrogen gas sensor using metal oxide nano particle and catalyst is provided to improve sensitivity on low concentration hydrogen and reduce reaction time.;CONSTITUTION: A manufacturing method of a hydrogen gas sensor using metal oxide nano particle and catalyst comprises following steps. Multiple metal oxide nanoparticles(110) consisting of one or more oxides among Sn, Zn, Al, Si, In, Ti, Cr, Fe, and Ni are formed. The metal nanoparticle is synthesized between the multiple metal oxide nanoparticles as catalyst for the reaction with the hydrogen. The synthesized material is spread on a substrate(190) is formed with an electrode(170).;COPYRIGHT KIPO 2011