METHOD FOR MANUFACTURING MONO-CRYSTAL SUBSTRATES, A METHOD FOR EVALUATING THE MONO-CRYSTAL SUBSTRATES, AND THE MONO-CRYSTAL SUBSTRATES, CAPABLE OF FORMING HIGH BULK-MICRO-DEFECT DENSITY IN A SURFACE PROXIMAL REGION

摘要

PURPOSE: A method for manufacturing mono-crystal substrates, a method for evaluating the mono-crystal substrates, and the mono-crystal substrates are provided to improve the bulk micro defect density in a surface proximal region by performing an additional oxygen precipitate growing process.;CONSTITUTION: A mono-crystal ingot is grown(S10). A mono-crystal substrate is processed using the mono-crystal ingot(S20). The mono-crystal substrate undergoes a rapid thermal process(S30). The rapid thermal process includes a first rapid thermal processing step and a second rapid thermal processing step. A bulk-micro-defect inspection is performed(S40).;COPYRIGHT KIPO 2011