REACTION FORCE TREATING APPARATUS CAPABLE OF MINIMIZING THE SIZE OF A STAGE DEVICE AND SUPPRESSING THE VIBRATION OF A TABLE

摘要

PURPOSE: A reaction force treating apparatus is provided to suppress the contact of a coil unit and a shaft unit without increment of the gap between the shaft unit and the coil unit.;CONSTITUTION: A reaction force treating apparatus(50) used in a stage device(1) comprises a connection unit(21) and a guide unit(22). The connection unit connects a stator of an actuator(11x,11y) to a stand(2) through escape units(24). The guide unit regulates the relative movement of the stator of the actuator toward a table(4) in one direction and guides the relative movement of the stator in the other direction.;COPYRIGHT KIPO 2011