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APPARATUS AND METHODS FOR SUPPLYING FUEL EMPLOYED BY ABATEMENT SYSTEMS TO EFFECTIVELY ABATE EFFLUENTS
APPARATUS AND METHODS FOR SUPPLYING FUEL EMPLOYED BY ABATEMENT SYSTEMS TO EFFECTIVELY ABATE EFFLUENTS
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机译:用于供应由减排系统所使用的燃料以有效地减少排放物的装置和方法
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摘要
An abatement apparatus for introducing fuel into an electronic device manufacturing effluent abatement tool, including: a manifold; a fuel source adapted to supply fuel to the manifold through a fuel conduit; and a plurality of nozzles adapted to receive fuel from the manifold; wherein the manifold is adapted to supply fuel to the nozzles at a fuel velocity greater than a flame velocity.
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