Phase-shifting interferometry method and system

摘要

Optical Phase interferometry is the other part of the optical wave 140 reflected from the multi-surface 109 to form a combined optical interference image; And recording an interference signal at different locations on the optical interference with respect to a change in the properties of the optical wave front that causes pairs of the multiple surfaces that have different optical distance difference to contribute differently to the interference signal (170); Converting the interfering signal to at least one position for making the spectrum having a peak at a spectral coordinate corresponding to each pair of multi-surface 180; And it comprises a step of identifying the selected spectral coordinate of the peak corresponding to the multi-surface pairs (190).