Full-wavelength ultrasonic welder of horizontal vibration type, and ultrasonic bonding apparatus having the same

摘要

A half wave length ultrasonic wave welding machine and an ultrasonic bonding device including the same are provided to make the replacement of a tool horn and the correction of planarity facilitated by having a slop on the one protruding side of the tool horn. An ultrasonic bonding device(200) including a half wave length ultrasonic wave welding machine comprises: a chip feeding unit(230) installed at one side of a table(220) in order to supply a chip; a stage unit(240) installed at the other one side of the table in order for a substrate having the chip to be settled; a feeding unit horizontally movable, established in the table in order to move the location of the substrate and to fix the substrate; a head unit(260) including a full spectrum ultrasonic-wave welding machine(100) of a transversal vibration mode; and a pick up unit transferring the chip to the full spectrum ultrasonic-wave welding machine of the transversal vibration mode.