Fabrication Method of High Aspect Ratio Nano/Micro Patterns by Vibration-assisted Filling Process

摘要

PURPOSE: A method for manufacturing a high aspect ratio micro/nano pattern is provided to effectively fill a resin by activating an interfacial property of the resin and a mold. CONSTITUTION: A pattern material of liquid state is filled with vibration on a part(431) in which a pattern of a mold(430) is formed. The mold in which the pattern material of the liquid state is filled is compressed with a substrate. The pattern material of the liquid state is hardened. In the filling step, a coater in which a vibrator for giving vibration to a top part is installed is used. The coater is one of a blade coater, a slit coater, and a roll coater.