A HIGH PURITY FUSED QUARTZ MELTING CRUCIBLE ASSEMBLY FOR MANUFACTURING A POLYCRYSTALLINE SILICON INGOT AND THE MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A poly-crystal silicon ingot manufacturing high purity vitreous silica crucible assembly and a manufacturing method thereof are provided to improve the productivity by producing an ingot after minimizing the inflow of impurities during growing the crystal. CONSTITUTION: A high purity quartz glass board with 99.99~99.999% is cut and ground. An impurity of the high purity quartz glass board surface is washed with a cleaning process. A fine crack and a concavo-convex of the high purity quartz glass board are removed with a fire polishing process. The processed high purity quartz glass board is fixed by using a graphite jig. The high purity quartz glass board fixed with the graphite jig is welded by a seamless welding. An annealing process for the welded high purity quartz glass board is executed.