SAMPLE HOLDER FOR COATING HIGH-REFLECTIVITY MIRROR FACET OF SEMICONDUCTOR LASER DIODE AND METHOD FOR COATING THEREOF

摘要

A sample holder for coating high-reflectivity mirror facet of a semiconductor laser diode and a method for coating thereof are provided to improve optical loss of the interface of the wall by using a high metal reflection layer. In a sample holder for coating high-reflectivity mirror facet of a semiconductor laser diode and a method for coating thereof, a base part(201) is used in order to accommodate a semiconductor chip. A movable part(203) is moved to the base part in the constant interval range. The movable part holds the semiconductor chip between the base part and it. A gap adjustment part adjusts an interval between the movable part and the base part. The gap adjustment part fixes the semiconductor chip between the base part and movable part. A blind plate(251) is moved towards the movable part on the base part.