METHOD OF MEASUREMENT thickness and refractive index of thin transparent coating on a substrate

摘要

A method of measuring the thickness and refractive index of thin transparent coatings on a substrate by irradiating a controlled coating of optical radiation, registration reflected from the coating flux of radiation and determining the parameters of the coating on the results of analysis for the flows, characterized in that the reshaping over a narrow spectral range of the wavelength incident on the controlled radiation coating determine the dependence of the reflected light flux of wavelength, measured on the basis of this dependence coefficients Reflection and first derivative reflectance sandwich "air - coating - substrate" system and on them are the thickness and refractive index of the coating.