A method and device for the determination of compositions of a solid sample by means of glowing discharge spectroscopy and for the determination of height differences in simultaneously

摘要

A method for determining the composition of a solid sample by means of glowing discharge spectroscopy and for the determination of height differences simultaneously for this purpose, in which, during the sputtering a solid sample– as a result of the sputtering light emitted by an imaging optic with chromatic aberration and through an entrance slit of a first spectrometer for spectrometric analysis of the solid sample is passed,– for this purpose, a simultaneously at least two-color light via a diaphragm, by means of a device for a - and decoupling between the entrance slit of the first spectrometer and of the optical imaging system with chromatic aberration is arranged, and by means of the imaging optics with chromatic aberration for sputtering area on the solid sample is passed,– the reflected portion of this light, in turn, via the optical imaging system with the chromatic aberration and by means of the device to a - and decoupling from the beam path of the emitted light and led out under utilization of the confocal imaging principle a second spectrometer for the evaluation and determination of height differences in the sputtering area is supplied to,– wherein at least..