Scattered light measuring device for testing technical surfaces, has cylindrical plano convex lens slidable in distance to illuminated surface, and rotatably held relative to illuminated surface around illumination direction

摘要

The device (1) has an illumination device (2) for illuminating a technical surface (4) to be inspected. A detection device (5) detects a scatter diagram (6) resulted from scattering of illumination light. A cylindrical plano convex lens is arranged in an optical path between the illumination device and the illuminated surface, so that a longitudinal axis of a curved optical surface is transverse to an illumination direction (11). The lens is slidable in a distance to the illuminated surface, and is rotatably held relative to the illuminated surface around the direction.