Tool induced shift compensating method for coordinate-measuring machine, involves utilizing compensation function in measured values of edges of structures of different structure types in orientation of mask

摘要

The method involves measuring a position of edges of structures of different structure types in an orientation of a mask (2) to be rotated around 180 degrees relative to another orientation of the mask by a coordinate-measuring machine (1). A number of measured structures of the same type in the rotated orientation are smaller or equal than that in the orientation of the mask. A compensation function is determined from measured values for the position and used in the measured values of the edges of the structures in the orientation of the mask. The determined function is stored in a database.