Spectroscopic measurement device for measuring optical radiation intensity distributions, has detector system adjusted for receiving diffracted radiation from two diffraction gratings

摘要

The spectroscopic measurement device has a diffraction grating (403) in one place, where another diffraction grating (404) is aligned in the place. The former diffraction grating receives one portion of an incident radiation, where the latter diffraction grating receives another portion of the incident radiation at the same time. A detector system (407) is adjusted for receiving the radiation diffracted from the two diffraction gratings.