Laser-scribing system for structuring substrates for thin-film solar modules

摘要

The invention relates to a laser scribing system for structuring substrates having a table for receiving at least one substrate, at least one carrier body which is parallel to and spaced from the table and at least one laser device attached to a movable unit for generating scribing tracks on the substrate. In this case, the carrier body relative to the table is arranged so that the movable body associated with the carrier body can perform movements on the carrier body in the direction of the scribing tracks. The movable unit has, together with the laser device to a mass which is substantially smaller than the mass of the carrier body.