Electrical linear motor for use in e.g. semiconductor industry, has secondary part movable opposite to primary part, and magnetic elements arranged at secondary part, where carrier of primary part is arranged between magnetic elements

摘要

The motor (1) has a primary part (2), and a secondary part (4) movable opposite to the primary part along a preset motion direction. A guiding device (6) guides movement of the secondary part in relation to the primary part. Two magnetic elements (12, 14) e.g. permanent magnets, are arranged at the secondary part, and a carrier (30) of the primary part is arranged between the magnetic elements. The primary part comprises a set of coils arranged between the magnetic elements. The carrier is formed from a set of sheet metals arranged one above the other.