Sensor arrangement, particularly acceleration-sensor arrangement, has substrate with main extension plane, and seismic mass that is suspended relative to substrate in movable manner

摘要

The sensor arrangement (1) has a substrate (2) with a main extension plane (100), and a seismic mass (3) that is suspended relative to the substrate in a movable manner. The detection elements (10,20) are moved relative to the seismic mass, and are fastened at the seismic mass.