Apparatus for evaporating material inside vacuum chamber, comprises vessel, in which material is evaporatable, where surface area of vessel outer wall is covered with porous heat-insulating layer, which is spaced with gap from outer wall

摘要

The apparatus (100) for evaporating a material (104) inside a vacuum chamber (101), comprises a vessel (103), in which the material is evaporatable, where a surface area of an outer wall of the vessel is covered with a porous heat-insulating layer (107), which is spaced with a gap from the outer wall of the vessel. A gas is conveyable through the pores of the heat-insulating layer and/or through the gap using a device. The heat-insulating layer comprises a bulk product such as granule and/or gravel, metal foam or graphite foam, and graphite fiber plates. The apparatus (100) for evaporating a material (104) inside a vacuum chamber (101), comprises a vessel (103), in which the material is evaporatable, where a surface area of an outer wall of the vessel is covered with a porous heat-insulating layer (107), which is spaced with a gap from the outer wall of the vessel. A gas is conveyable through the pores of the heat-insulating layer and/or through the gap using a device. The heat-insulating layer comprises a bulk product such as granule and/or gravel, metal foam or graphite foam, and graphite fiber plates. The closing of the gap is formed at the top edge of the vessel as a nozzle. The exit direction of the gases from the nozzle is adjustable and the shape of the rising vapor clouds is modeled. The material is evaporatable by an electron beam generating device. The apparatus has a sensor, by which a value for the temperature of the vessel or a value for the temperature of the heat-insulating layer is detectable, and an evaluation device, by which the conveying quantity of the gases is regulated in dependent of the values detected by the sensor. The vessel consists of graphite, metal, metal compound, sintering body or ceramic. The device for conveying the gases through the pores and/or through the gap is operatable with switched-on vacuum pumps that are used for generating vacuum in the vacuum chamber and with switched-off vacuum pumps. The apparatus has a further device, by which the gas is pumpable from the vacuum chamber.