Method for optical testing of sample during e.g. chemical analysis, involves detecting optical emission of sample depending on characteristic modulation i.e. temporally periodic modulation, of particle beam

摘要

The method involves irradiating a sample (26) with a temporally characteristic modulated particle beam (35) i.e. electron beam. The particle beam is selected in such a manner that the particle beam partially reversibly modifies the sample. The sample is excited to produce an optical emission from the sample by optical excitation, electrical excitation or thermal excitation. The optical emission of the sample is detected depending on the characteristic modulation i.e. temporally periodic modulation, of the particle beam. An independent claim is also included for a device for optical testing of a sample, comprising a source of particle beam.