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Plasma stamp and method for plasma treatment of a surface

机译:等离子印模和用于表面等离子体处理的方法

摘要

The present invention relates to a plasma stamp having at least one cavity, the at least one opening, in front of which a substrate to be treated can be arranged, a dielectric base arranged opposite the opening and a first electrically conductive wall arranged between the opening and the bottom has and with a second electrode, which is arranged on a side facing away from the cavity of the bottom.
机译:等离子体印模技术领域本发明涉及一种等离子体印模,其具有至少一个空腔,该至少一个开口可以在其前面布置要处理的衬底,与该开口相对地布置的电介质基底以及在该开口之间布置的第一导电壁。底部具有第二电极,该第二电极布置在背离底部腔的一侧。

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