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Plasma stamp and method for plasma treatment of a surface
Plasma stamp and method for plasma treatment of a surface
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机译:等离子印模和用于表面等离子体处理的方法
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摘要
The present invention relates to a plasma stamp having at least one cavity, the at least one opening, in front of which a substrate to be treated can be arranged, a dielectric base arranged opposite the opening and a first electrically conductive wall arranged between the opening and the bottom has and with a second electrode, which is arranged on a side facing away from the cavity of the bottom.
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