Suppressing interference effects on surface illuminated by laser beam, comprises guiding laser beam through optical elements before impinging on surface, and oscillatingly changing one of the optical elements in their optical properties

摘要

The process for suppressing interference effects (52, 52') on a surface (50) illuminated by a laser beam, comprises guiding the laser beam through optical elements (42' 44, 46, 48) before impinging on the surface, and oscillatingly changing one of the optical elements in their optical properties in a predetermined manner, so that an impingement of the laser beam on the surface oscillatingly changes. The optical properties are periodically changes. The optical elements are moved transverse to a propagation direction (38) of the laser beam and are tilted relative to the propagation direction. The process for suppressing interference effects (52, 52') on a surface (50) illuminated by a laser beam, comprises guiding the laser beam through optical elements (42' 44, 46, 48) before impinging on the surface, and oscillatingly changing one of the optical elements in their optical properties in a predetermined manner, so that an impingement of the laser beam on the surface oscillatingly changes. The optical properties are periodically changes. The optical elements are moved transverse to a propagation direction (38) of the laser beam and are tilted relative to the propagation direction of the laser beam. The optical element is laminarly changes in its reflection properties and transmission properties, where deformation waves are produced on the surface of the optical element and shock waves are produced in the optical element. Independent claims are included for: (1) a device for suppressing interference effects on a surface illuminated by a laser beam; and (2) a device for surface melting of layers on a substrate using a laser beam.