Thermally stressed elements tempering device for e.g. illumination system of extreme UV-projection exposure apparatus, has gas chamber provided between thermally stressed and tempering elements, where heat flow takes place between elements

摘要

The device has tempering elements (10) spatially separated by thermally stressed elements (8) e.g. mechatronic elements, and spaced apart from the thermally stressed elements. A gas chamber (11) is provided between the thermally stressed and tempering elements. The chamber is filled with gas with an adjustable pressure (P). Heat flow takes place between the thermally stressed and tempering elements via the gas by conduction, where the gas has a higher thermal conductivity than air.