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Device for optical detection of defects on an object with an at least partially not - planar surface of the optical quality
Device for optical detection of defects on an object with an at least partially not - planar surface of the optical quality
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机译:用于光学检测物体上具有至少部分非平面光学质量的表面上的缺陷的设备
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摘要
Device for optical detecting faults in an examination zone (30, 30 '', 30 ") on an at least some of which are not - planar surface of the optical quality of an object (8) with an illumination means (21), an image pickup means (11) with a connected image processing computer (14) to the evaluation unit, to store and display of recorded images of the examination zone (30, 30'', 30"), wherein the illumination device (21) in the focal plane (20) of a field lens (4) is arranged, wherein between the illumination means (21) and the field lens (4) is a beam splitter (6) is arranged and the parallel to the optical axis of the field lens (4) of the examination zone (30, 30 '', 30 ") in the direction of the field lens (4) light emitted by means of the field lens (4), the beam splitter (6) and a in the image pick-up means for strength focal plane (10) of the field lens (4) and located as the entrance pupil (13) of the objective lens (12) of the picture-taking unit (11), which is in the aperture diaphragm of the field lens (4) on a video pickup device (11) is passed, characterised in that, between the field lens (4) and the object (8) an object-specific..
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