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Device for optical detection of defects on an object with an at least partially not - planar surface of the optical quality

机译:用于光学检测物体上具有至少部分非平面光学质量的表面上的缺陷的设备

摘要

Device for optical detecting faults in an examination zone (30, 30 '', 30 ") on an at least some of which are not - planar surface of the optical quality of an object (8) with an illumination means (21), an image pickup means (11) with a connected image processing computer (14) to the evaluation unit, to store and display of recorded images of the examination zone (30, 30'', 30"), wherein the illumination device (21) in the focal plane (20) of a field lens (4) is arranged, wherein between the illumination means (21) and the field lens (4) is a beam splitter (6) is arranged and the parallel to the optical axis of the field lens (4) of the examination zone (30, 30 '', 30 ") in the direction of the field lens (4) light emitted by means of the field lens (4), the beam splitter (6) and a in the image pick-up means for strength focal plane (10) of the field lens (4) and located as the entrance pupil (13) of the objective lens (12) of the picture-taking unit (11), which is in the aperture diaphragm of the field lens (4) on a video pickup device (11) is passed, characterised in that, between the field lens (4) and the object (8) an object-specific..
机译:用检查装置(30、30″,30″)中的至少一个不是光学检查区域(30、30″,30″)中的故障的装置-具有照明装置(21)的物体(8)的光学质量的平面,图像拾取装置(11)与评估单元相连的图像处理计算机(14),用于存储和显示检查区(30、30'',30'')的记录图像,其中照明设备(21)位于布置了物镜(4)的焦平面(20),其中在照明装置(21)和物镜(4)之间布置了分束器(6),并且该光束分离器平行于场的光轴。视场镜(4)方向上检查区域(30、30'',30'')的镜(4)借助场镜(4),分束器(6)和用于物镜(4)的强度焦平面(10)的摄像装置,位于摄像单元(11)的物镜(12)的入射光瞳(13)处,位于光圈中dia通过视频拾取装置(11)上的物镜(4)的膜片,其特征在于,在物镜(4)和物体(8)之间具有特定的物体。

著录项

  • 公开/公告号DE202010009052U1

    专利类型

  • 公开/公告日2010-10-07

    原文格式PDF

  • 申请/专利权人

    申请/专利号DE202010009052U1

  • 发明设计人

    申请日2010-06-15

  • 分类号G01N21/90;G01N21/958;

  • 国家 DE

  • 入库时间 2022-08-21 18:27:53

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