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piezoelektrisches resonatorelement and piezoelektrisches component

机译:压电元件和压电元件

摘要

A piezoelectric resonator element (32) includes a base portion (51) formed of a piezoelectric material, a plurality of resonating arms (35,36) formed integrally with the base portion and extending parallel to each other, a longitudinal groove formed along a longitudinal direction of each of the resonating arms, and an electrode for driving formed in the longitudinal groove. A width of each of the resonating arms is gradually decreased from the base portion toward a tip of the resonating arm, and a change point of width variation is provided close to the tip of the resonating arm. The width variation shifts from decrease to increase at the change point. The change point is located closer to the tip of the resonating arm than an end of the longitudinal groove.
机译:压电谐振器元件(32)包括:由压电材料形成的基部(51);与基部一体形成并彼此平行地延伸的多个谐振臂(35,36);沿着纵向方向形成的纵向凹槽。每个谐振臂的方向,并在纵向槽中形成用于驱动的​​电极。每个谐振臂的宽度从基部到谐振臂的末端逐渐减小,并且宽度变化的改变点被设置为靠近谐振臂的末端。宽度变化在变化点从减小到增大。改变点位于比纵向凹槽的端部更靠近谐振臂的尖端的位置。

著录项

  • 公开/公告号DE602005020725D1

    专利类型

  • 公开/公告日2010-06-02

    原文格式PDF

  • 申请/专利权人 SEIKO EPSON CORP.;

    申请/专利号DE20056020725T

  • 发明设计人 TANAYA HIDEO;

    申请日2005-09-23

  • 分类号H03H9/21;

  • 国家 DE

  • 入库时间 2022-08-21 18:27:26

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