DEFECT CORRECTION DEVICE, DEFECT TRACKING METHOD, AND DEFECT TRACKING PROGRAM

摘要

PROBLEM TO BE SOLVED: To repair a defect, while suppressing increase of the number of processes and redundancy of a working time.SOLUTION: This defect correction device 100 including a microscope part 110 for acquiring an image in which a part of a workpiece W 10 is enlarged, and a laser repair head 120 for irradiating the workpiece W 10 with laser light spatially modulated for defect repair based on an image acquired by the microscope part 110, also includes a control part 101 for determining whether a defect D included in the image acquired by the microscope part 110 is extended to the outside of the image, tracking the defect so that a part extended to the outside of the image is drawn into a visual filed region R1 of the microscope part 110, when the defect D is extended to the outside of the image, and setting one or more shot regions to the defect D included in the image acquired by the microscope part 110. The control part 101 sets one or more shot regions to the defect D included in the image acquired by the microscope part 110 after tracking.