STANDARD LATTICE, METHOD OF USING STANDARD LATTICE, AND OPTICAL INTERFERENCE TOMOGRAPHIC IMAGE DIAGNOSTIC APPARATUS WITH STANDARD LATTICE

摘要

PROBLEM TO BE SOLVED: To provide a standard lattice etc. suited to precisely diagnosing an optical interference tomographic image.;SOLUTION: The standard lattice 100 is used for diagnosing an optical interference tomographic image, formed of a light-transmitting member, and equipped with two or more grid lines 110 on the member. The two or more grid lines 110 are displayed on the optical interference tomographic image. The standard lattice 100 is fixed on an object, the standard lattice 100 and the object are irradiated with low interference light, the standard lattice 100 and the object are measured based on reflected light of the low interference light reflected by the standard lattice 100 and the object, and an error in a measured dimension of the measured object is specified based on a difference of a measured dimension between the grid lines 110 on the standard lattice 100 and an actual dimension between the grid lines 110.;COPYRIGHT: (C)2011,JPO&INPIT