MOVEMENT INFORMATION DETECTION METHOD, MOVEMENT INFORMATION DETECTION PROGRAM, MEASURING INSTRUMENT, OPTICAL SYSTEM, ALIGNER, AND DEVICE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a movement information detection method increasing the accuracy in detection of movement information of a moving member using a position sensor, and to provide a movement information detection program, a measuring instrument, an optical system, an aligner and a method of manufacturing a device.;SOLUTION: In step S11, a lens is moved in a Z-axis direction and a θx direction, a Y-axis moving amount d of the lens is detected by the position sensor at a plurality of positions, and the position and the tilt angle of the lens in relation to the Z-axis direction when the Y-axis moving amount is detected are detected. In steps S12, 13, the tilt angle θ of a scale of the position sensor is calculated. Then, the Y-axis moving amount of the lens is corrected by the position sensor based on the calculated tilt angle θ.;COPYRIGHT: (C)2011,JPO&INPIT