TEMPLATE PROCESSOR, IMPRINT SYSTEM, RELEASE AGENT PROCESSING METHOD, PROGRAM AND COMPUTER STORAGE MEDIUM

摘要

PROBLEM TO BE SOLVED: To properly form a release agent on the surface of a template.;SOLUTION: A template processor 1 is configured by integrally connecting a template carrying in and out station 2 with a processing station 3. The template carrying in and out station 2 retains a plurality of templates T, and carries in and out a template T for the processing station 3. The processing station 3 is provided with a plurality of conveyance rollers which convey the template T along a conveyance line A. On the conveyance line A, a precleaning unit 21, a coating unit 22, a heating unit 23, a temperature control unit 24, a rinse unit 25, a release agent reforming unit 26, and a post cleaning unit 27 which perform prescribed processing for the template T during conveyance, are arranged in this order, in the conveyance direction of the template T. On the release agent reforming unit 26, UV rays are applied to the release agent on an outside area of the template T, and the release effect of the UV rays is weakened thereby.;COPYRIGHT: (C)2011,JPO&INPIT