OPTICAL DETECTION DEVICE, OPTICAL CHARACTERISTIC MEASUREMENT DEVICE, OPTICAL CHARACTERISTIC MEASUREMENT METHOD, EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD OF MANUFACTURING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an optical detection device usable for optical characteristics measurement of an inspection object optical system having a large numerical aperture, to provide an optical characteristics measurement device using the same, to provide an optical characteristics measurement method, to provide an exposure apparatus, to provide an exposure method, and to provide a method of manufacturing a device.;SOLUTION: The optical detection device includes an imaging unit including: a substrate; an aperture pattern arranged on one surface of the substrate; a fluorescent unit having a fluorescent film formed on a surface of the substrate facing the one surface; a light guide member composed by bundling a plurality of optical fibers; and an imaging element arranged in contact with one surface of the light guide member. Here, a surface of the fluorescent unit on the fluorescent film side is arranged oppositely to a surface of the imaging unit on the light guide member side.;COPYRIGHT: (C)2011,JPO&INPIT