PERFLUOROCARBON REMOVING AGENT AND METHOD FOR REMOVING PERFLUOROCARBON

摘要

PROBLEM TO BE SOLVED: To easily and efficiently remove 3-10C perfluorocarbon (PFC) at a room temperature.;SOLUTION: PFC-containing gas is brought into contact with a removing agent containing a binderless X-type zeolite in order to adsorb and remove PFC.;COPYRIGHT: (C)2011,JPO&INPIT