SHAPE DEFECT INSPECTION DEVICE, SHAPE MODELING DEVICE, AND SHAPE DEFECT INSPECTION PROGRAM

摘要

PPROBLEM TO BE SOLVED: To detect a defect by observing the shape of an inspection object while taking into account individual difference. PSOLUTION: An inspection image pickup part 154 picks up an image of a cell to be a workpiece, and obtains an inspection image. An extraction part 160 refers to the inspection image, and specifies an inspection edge point that is the point located at a contour part of the workpiece. An inspection edge error calculation part 168 calculates the distance between a basic function for defining the contour line of the cell to be the master and the inspection edge point. A defect point specifying part 174 excludes the inspection edge point having a large discrepancy as a defect point. An inspection function specifying part 172 calculates an inspection function for defining the contour line of the workpiece on the basis of the coordinates of the inspection edge point other than the defect point. The inspection edge error calculation part 168 calculates the distance between the inspection function and the inspection edge point. The inspection edge point that is discrepant from the inspection function is specified as a defect candidate point. A defect determination part 176 determines the defect of the workpiece on the basis of the defect candidate point. PCOPYRIGHT: (C)2011,JPO&INPIT