CRYSTAL ORIENTATION IDENTIFICATION SYSTEM AND TRANSMISSION ELECTRON MICROSCOPE

摘要

PPROBLEM TO BE SOLVED: To analyze a crystal orientation of fine crystal grains by using an electron beam diffraction image, and to analyze a multipoint crystal orientation quickly by automating analysis. PSOLUTION: This transmission electron microscope for detecting transmission electrons by irradiating a sample with an electron beam includes an electron beam diffraction image imaging part for imaging an electron beam diffraction image of the sample, a detection part for acquiring composition information of the sample, an analysis part for acquiring information of a lattice plane interval from the electron beam diffraction image, a material identification part for identifying the sample from the acquired composition information and the information of the lattice plane interval, and an operation part for operating a diffraction image of the sample from the identified sample information. In the microscope, the crystal orientation of the sample is specified based on a deviation amount between the operated diffraction image and the electron beam diffraction image. PCOPYRIGHT: (C)2011,JPO&INPIT