DEVICE AND METHOD FOR MONITORING STATIC ELIMINATOR, AND MONITORING PROGRAM FOR STATIC ELIMINATOR

摘要

PROBLEM TO BE SOLVED: To provide a device for monitoring a static eliminator that allows execution of a highly reliable electrical characteristic inspection by monitoring the static eliminator for eliminating static electricity, charged in a workpiece, when executing an electrical characteristic inspection of a semiconductor wafer W.;SOLUTION: The monitoring device (monitoring circuit) 22 for the static eliminator monitors the static eliminator 20 that eliminates static electricity, charged in the semiconductor wafer W from a main chuck 14, by using a discharge switch circuit 21A when executing an electric-characteristic inspection of the semiconductor wafer W by bringing the semiconductor wafer W on the main chuck 14 into contact with a probe card 15 by the relative movement of the main chuck 14 and the probe card. The device includes: a detection switch circuit 22A that is linked with the discharge switch circuit 21A of the static eliminator 20 and detects a malfunction of the discharge switch circuit 21A; a detection drive circuit 22B for opening and closing the detection switch circuit 22A; and a decision circuit 22C for determining a malfunction of the discharge switch circuit 21A via the detection switch circuit 22A.;COPYRIGHT: (C)2011,JPO&INPIT