METHOD FOR PRODUCING ZINC OXIDE THIN FILM, ANTISTATIC THIN FILM PRODUCED BY THE SAME METHOD, ULTRAVIOLET RAY BLOCKING THIN FILM, AND TRANSPARENT ELECTRODE THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide a method of preparing a zinc oxide thin film, which has an average transmittance of 80% or more for visible light and a low volume resistivity, from a composition based on a partial hydrolyzate of an organic zinc compound such as diethyl zinc, and also to provide an antistatic thin film or the like using this method.;SOLUTION: There is provided a method of producing the zinc oxide thin film having an average transmittance of 80% or more for visible light and a low volume resistivity of 1×10^-3Ω cm or less, wherein spray coating is applied on the heated substrate surface under an inert gas atmosphere containing steam such as the composition containing the partial hydrolyzate of the organic zinc compound. Also there are provided the antistatic thin film, an ultraviolet ray blocking thin film, and a transparent electrode thin film, each of which includes the zinc oxide thin film produced in the described method.;COPYRIGHT: (C)2011,JPO&INPIT